Contamination mitigation strategies for scanning transmission electron microscopy

Contamination mitigation strategies for scanning transmission electron microscopy.

Modern scanning transmission electron microscopy (STEM) enables imaging and microanalysis at very high magnification. In the case of aberration-corrected STEM, atomic resolution is readily achieved. However, the electron fluxes used may be up to three orders of magnitude greater than those typically employed in conventional STEM. Since specimen contamination often increases with electron flux, ...

15. Scanning Transmission Electron Microscopy

Scanning Transmission Electron Microscopy for Nanostructure Characterization

Scanning transmission low-energy electron microscopy

We discuss an extension to the transmission mode of the cathode-lens-equipped scanning electron microscope, enabling operation down to the lowest energies of electrons. Penetration of electrons through free-standing ultrathin films is examined along the full energy scale, and the contribution of the secondary electrons (SEs), released near the bottom surface of the sample, is shown, enhancing t...

Z-contrast Scanning Transmission Electron Microscopy